Simulating imaging systems which include grating elements is a necessary task with practical applications: for instance, to model the behaviour of wafer inspection systems. VirtualLab Fusion facilitates the exercise through its fast physical optics approach, allowing for
the inclusion of gratings in high-NA systems
the consideration of realistic diffraction efficiencies
automatically taking into account vectorial effects
dealing with holographic optical elements and volume gratings
in both ray and physical optics simulations.
Optical system for inspection of micro-structured wafer
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