The thorough investigation of interferometers, spectrometers and the imaging quality and resolution limit of microscopes with conventional or structured illumination is enabled by fast physical optics.
Optics has provided throughout history the means to perform incredibly accurate measurements, a vital cog in catapulting the potential of science and technology. An analysis of metrology systems unavoidably requires the consideration of physical optics effects (coherence, polarization, interference, diffraction, etc.) to yield realistic, well-informed results. VirtualLab Fusion provides the necessary tools for such an analysis, taking advantage of the fast physical optics theory to, moreover, facilitate fast simulations.
Benefits
Easy switching between ray tracing and fast physical optics simulations for the same systems.
High-performance analysis of complex systems.
Fast simulation of coherence effects and interference patterns.
Automatic consideration of vectorial effects.
Rigorous analysis of gratings cogently included in the model for the entire, complex system.
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