This tutorial example demonstrates simulation of an isolated contact hole, as depicted below:
The geometrical setup defined in the layout.jcm file is:
Layout3D {
UnitOfLength = 1e-09
MeshOptions {
MaximumSideLength = 50
}
BoundaryConditions {
Boundary {
Direction = Vertical
Class = Transparent
}
}
Extrusion {
Objects {
Parallelogram {
Name = "ContactHole"
DomainId = 2
Width = 280
Height = 280
}
Polygon {
Name = "ComputationalDomain"
DomainId = 1
Priority = -1
Boundary {
Class = Transparent
}
ConvexHull {
Parent = "ContactHole"
Offset = 50
}
}
}
MultiLayer {
Layer {
Bottom {
GlobalZ=-50
}
Thickness = 50
DomainIdMapping = [1 3 2 3]
}
Layer {
Thickness = 72
DomainIdMapping = [1 2 2 1]
}
Layer {
Thickness = 50
DomainIdMapping = [1 1 2 1]
}
}
}
}
The given parallelogram defines the hole on the mask with side length 280nm. Since this pattern is modelled as isolated, it is surrounded by the absorbing mask material in lateral direction. In JCMsuite this is conveniently set up by defining a ConvexHull around a geometrical primitive. This automatically sets up a convex hull with minimum distance Offset to the enclosed pattern. For the ConvexHull the DomainId and Priority and Boundary can be defined as usual.
Since the mask pattern is isolated, any number of incident plane waves with same frequency and different incident direction can be defined as sources:
SourceBag {
Source {
ElectricFieldStrength {
PlaneWave {
Lambda0 = 193e-9
Incidence = FromBelow
Sigma = [0 0]
SP = [1 0]
}
}
}
}
SourceBag {
Source {
ElectricFieldStrength {
PlaneWave {
Lambda0 = 193e-9
Incidence = FromBelow
Sigma = [0 0]
SP = [0 1]
}
}
}
}
SourceBag {
Source {
ElectricFieldStrength {
PlaneWave {
Lambda0 = 193e-9
Incidence = FromBelow
Sigma = [0.5 0]
SP = [1 0]
}
}
}
}
SourceBag {
Source {
ElectricFieldStrength {
PlaneWave {
Lambda0 = 193e-9
Incidence = FromBelow
Sigma = [0.5 0]
SP = [0 1]
}
}
}
}
SourceBag {
Source {
ElectricFieldStrength {
PlaneWave {
Lambda0 = 193e-9
Incidence = FromBelow
Sigma = [0 0.5]
SP = [1 0]
}
}
}
}
SourceBag {
Source {
ElectricFieldStrength {
PlaneWave {
Lambda0 = 193e-9
Incidence = FromBelow
Sigma = [0 0.5]
SP = [0 1]
}
}
}
}
SourceBag {
Source {
ElectricFieldStrength {
PlaneWave {
Lambda0 = 193e-9
Incidence = FromBelow
Sigma = [0.5 0.5]
SP = [1 0]
}
}
}
}
SourceBag {
Source {
ElectricFieldStrength {
PlaneWave {
Lambda0 = 193e-9
Incidence = FromBelow
Sigma = [0.5 0.5]
SP = [0 1]
}
}
}
}
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